Precise open-loop control of MEMS deformable mirror shape

نویسندگان

  • Thomas Bifano
  • Jason Stewart
  • Alioune Diouf
چکیده

A new method is introduced for predicting control voltages that will generate a prescribed surface shape on a deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5μm amplitudes have been achieved with less than 15nm RMS error.

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تاریخ انتشار 2010